JPH0342401B2 - - Google Patents

Info

Publication number
JPH0342401B2
JPH0342401B2 JP57040770A JP4077082A JPH0342401B2 JP H0342401 B2 JPH0342401 B2 JP H0342401B2 JP 57040770 A JP57040770 A JP 57040770A JP 4077082 A JP4077082 A JP 4077082A JP H0342401 B2 JPH0342401 B2 JP H0342401B2
Authority
JP
Japan
Prior art keywords
measured
displacement
optical path
light
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57040770A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58158506A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP57040770A priority Critical patent/JPS58158506A/ja
Publication of JPS58158506A publication Critical patent/JPS58158506A/ja
Publication of JPH0342401B2 publication Critical patent/JPH0342401B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP57040770A 1982-03-17 1982-03-17 変位の光学的測定方法 Granted JPS58158506A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57040770A JPS58158506A (ja) 1982-03-17 1982-03-17 変位の光学的測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57040770A JPS58158506A (ja) 1982-03-17 1982-03-17 変位の光学的測定方法

Publications (2)

Publication Number Publication Date
JPS58158506A JPS58158506A (ja) 1983-09-20
JPH0342401B2 true JPH0342401B2 (en]) 1991-06-27

Family

ID=12589862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57040770A Granted JPS58158506A (ja) 1982-03-17 1982-03-17 変位の光学的測定方法

Country Status (1)

Country Link
JP (1) JPS58158506A (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60263802A (ja) * 1984-06-12 1985-12-27 Hitachi Ltd 変位の光学的測定方法
JPS61219802A (ja) * 1985-03-27 1986-09-30 Hitachi Ltd 変位の光学的測定装置
JP2006275910A (ja) * 2005-03-30 2006-10-12 Canon Inc 位置センシング装置及び位置センシング方法
JP4301313B2 (ja) 2007-03-22 2009-07-22 ブラザー工業株式会社 無線電話装置
CN111174694B (zh) * 2020-02-24 2025-07-11 山西大威激光科技有限公司 一种激光干涉位移测量装置及其使用方法

Also Published As

Publication number Publication date
JPS58158506A (ja) 1983-09-20

Similar Documents

Publication Publication Date Title
US4881816A (en) Linear and angular displacement measuring interferometer
EP0250306B1 (en) Angle measuring interferometer
JPH07181007A (ja) 干渉計応用測定装置
EP0316356B1 (en) Improvements in or relating to measuring
GB2252155A (en) Optical diffraction grating position detector using polarisation rotation to remove the effects of unwanted fluctuations
US5374991A (en) Compact distance measuring interferometer
JPS60256079A (ja) 半導体レ−ザを用いた微小変位測定装置
US4807997A (en) Angular displacement measuring interferometer
JPH0342401B2 (en])
WO1988002474A1 (en) Optical wavelength monitor
GB2201509A (en) Displacement measuring apparatus capable of forming an output signal of substantially constant amplitude
JPS6356924B2 (en])
US5067813A (en) Optical apparatus for measuring displacement of an object
EP0199137B1 (en) Method of and apparatus for optically measuring displacement
JPH0472163B2 (en])
EP0461773A2 (en) Linear pitch, and yaw displacement measuring interferometer
JPS6355035B2 (en])
Usuda et al. Development of laser interferometer for a sine-approximation method
JPS6231281B2 (en])
JPH11257915A (ja) 変位測定用干渉計
JPH0376843B2 (en])
JPS586405A (ja) 微小隙間の光学的測定方法
JP2775000B2 (ja) 移動量測定方法及び移動量測定装置
JPS63277925A (ja) 測長装置
JPH03115922A (ja) 信号処理回路及び該回路を備えた変位測定装置